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Samsung patents tank system to break down CF4 gas with electrodes

Samsung has filed a patent for a system that processes carbon tetrafluoride (CF4) gas using a reaction container filled with an electrolyte solution. The design features three electrodes placed inside the container to interact with the gas as it dissolves.

Why it mattersThis filing describes a specific industrial method for handling a gas commonly used in semiconductor manufacturing, likely aimed at improving waste treatment or recycling processes in chip factories.

In the filing’s own words

A gas processing system includes a reaction container for receiving CF 4 gas, a cover covering an upper end of the reaction container, a first electrode passing through the cover and extending into the reaction container, a second electrode passing through the cover and extending into the reaction container and disposed at one side of the first electrode, a third electrode passing through the cover and extending into the reaction container, and interposed between the first and second electrodes, and an electrolyte solution disposed in the reaction container to dissolve the gas.

What exactly they claim (claim 1)

1. A system for processing a gas, the system comprising: a reaction container configured to receive CF 4 gas; a cover covering an upper end of the reaction container; a first electrode passing through the cover and extending into the reaction container; a second electrode passing through the cover, extending into the reaction container, and disposed at one side of the first electrode; a third electrode passing through the cover, extending into the reaction container, and interposed between the first and second electrodes; and an electrolyte solution disposed in the reaction container and configured to dissolve the gas.

Facts

Company
Samsung (SAMSUNG ELECTRONICS CO., LTD.)
Official title
SYSTEM FOR PROCESSING GAS AND METHOD FOR PROCESSING GAS USING THE SAME
Publication number
US20260273460A1
Application number
19533648
Filed
Feb 9, 2026
Published
Sep 17, 2026
Inventors
3
Claims
20

Classified under

B01D 53/326 Operations & transportB01D 53/70 Operations & transportB01D 53/02 Operations & transportB01D 2255/1021 Operations & transportB01D 2255/702 Operations & transportB01D 2255/806 Operations & transport
Read the full filing (official PDF) ↗ Open in the Patent Tracker

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Summaries are simplified from the filing’s own abstract and first claim. A patent filing is not a product announcement.
Patent data and drawings: U.S. Patent and Trademark Office (USPTO). Nebula is not affiliated with or endorsed by the USPTO.