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SamsungGranted patentMaterials & manufacturingInterest 4/10

Samsung patents scrubber that turns waste gas into plasma before burning it

Samsung has been granted a patent for a scrubber system that cleans waste gas using two stages. The device first passes the gas through a plasma generator to break down contaminants, then sends it to a combustor where a flame finishes the cleaning process.

Why it mattersThis design could help factories clean up industrial exhaust more effectively by combining plasma and flame treatment in one machine.

In the filing’s own words

A scrubber may include a plasma processing unit including a plasma generating device and a power generating device, a combustion processing unit including a combustor, which is used to form a flame, a connection conduit connected to the plasma processing unit and spaced apart from the combustion processing unit, and a back-end processing unit connected to the combustion processing unit. The connection conduit may be used to supply a waste gas to the plasma generating device, and the plasma generating device may be configured to form plasma using the waste gas. The plasma and combustion processing units may be configured to provide a first reaction space, in which the plasma is formed, and a second reaction space, in which the flame is formed.

What exactly they claim (claim 1)

1. A scrubber, comprising: a plasma processing unit including a plasma generator; a power supply; a combustion processing unit including a combustor configured to form a flame; a connection conduit configured to supply a waste gas to the plasma generator; and a back end processing unit connected to the combustion processing unit, wherein the plasma generator is configured to form plasma using the waste gas, and the plasma processing unit is configured to provide a first reaction space in which the plasma is formed, and the combustion processing unit is configured to provide a second reaction space in which the flame is formed.

Facts

Company
Samsung (Samsung Electronics Co., Ltd.)
Official title
Scrubber, substrate processing system including the same, and substrate processing method using the same
Patent number
US12731770B2
Application number
18931884
Filed
Oct 30, 2024
Granted
Sep 8, 2026
Inventors
12
Claims
19

Classified under

H01J 37/32844 Electricity & electronicsH01J 37/32449 Electricity & electronicsH01J 37/32889 Electricity & electronicsH01J 2237/3321 Electricity & electronicsH01J 2237/334 Electricity & electronicsH01J 2237/335 Electricity & electronics
Read the full filing (official PDF) ↗ Open in the Patent Tracker

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Summaries are simplified from the filing’s own abstract and first claim. A patent filing is not a product announcement.
Patent data and drawings: U.S. Patent and Trademark Office (USPTO). Nebula is not affiliated with or endorsed by the USPTO.