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Samsung patents drying method using supercritical fluid for substrates

Patent drawing
Patent drawing from the official filing.

The patent describes a method for drying a substrate by placing it in a chamber and first introducing a gas. After the gas flow begins, a supercritical fluid version of that gas is added to the chamber to complete the drying process.

Why it mattersThis technique improves the precision of drying delicate materials used in electronics manufacturing, which is a standard step in producing high-quality components.

In the filing’s own words

A method of processing a substrate includes disposing a substrate in a drying chamber, and supplying a fluid into the drying chamber in which the substrate is disposed. The supplying of the fluid into the drying chamber includes supplying a gas into the drying chamber, and supplying a supercritical fluid into the drying chamber after the supplying of the gas is started.

What exactly they claim (claim 1)

1. A method of processing a substrate, the method comprising: disposing the substrate in a drying chamber; and supplying a fluid into the drying chamber in which the substrate is disposed, wherein the supplying of the fluid into the drying chamber comprises: supplying, after the disposing of the substrate in the drying chamber, a gas into the drying chamber; and supplying, after the supplying of the gas into the drying chamber, a supercritical fluid of the gas into the drying chamber.

Facts

Company
Samsung (Samsung Electronics Co., Ltd.)
Official title
Substrate processing apparatus and method of processing a substrate using the same
Patent number
US12768593B2
Application number
18095125
Filed
Jan 10, 2023
Granted
Oct 20, 2026
Inventors
3
Claims
20

Classified under

F26B 5/005 Mechanical engineeringF26B 5/04 Mechanical engineeringG03F 7/2024 Physics & computingH10P 70/20 Electricity & electronics
Read the full filing (official PDF) ↗ Open in the Patent Tracker

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Summaries are simplified from the filing’s own abstract and first claim. A patent filing is not a product announcement.
Patent data and drawings: U.S. Patent and Trademark Office (USPTO). Nebula is not affiliated with or endorsed by the USPTO.