SamsungPatent applicationChips & hardwareInterest 3/10

Samsung patents chip-making tool with a shape-shifting coil

Patent drawing from the official filing.

Samsung has filed a patent for a machine used to process computer chips. The device uses a coil that can change its physical shape to create an electric field inside a chamber, which helps control how gases interact with the chip.

Why it mattersThis design could help manufacturers fine-tune the environment around a chip during production, potentially leading to more precise manufacturing processes.

In the filing’s own words

Provided is a substrate processing apparatus including a process chamber, a gas injector connected to a ceiling portion of the process chamber, an induction coil on the process chamber, the induction coil being configured to form an electric field area in the process chamber, and a stage on a bottom portion of the process chamber, the stage being configured to receive a substrate, wherein a shape of the induction coil is changeable.

What exactly they claim (claim 1)

1. A substrate processing apparatus comprising: a process chamber; a gas injector connected to a ceiling portion of the process chamber; an induction coil on the process chamber, the induction coil being configured to form an electric field area in the process chamber; and a stage on a bottom portion of the process chamber, the stage being configured to receive a substrate, wherein a shape of the induction coil is changeable.

Facts

Company: Samsung (SAMSUNG ELECTRONICS CO., LTD.)
Official title: SUBSTRATE PROCESSING APPARATUS
Publication number: US20260331421A1
Application number: 19468376
Filed: Feb 3, 2026
Published: Oct 22, 2026
Inventors: 7
Claims: 20

Classified under

H01J 37/3211 Electricity & electronicsH01J 37/32357 Electricity & electronicsH01J 37/3244 Electricity & electronicsH01J 2237/002 Electricity & electronicsH01J 2237/3343 Electricity & electronics

Read the full filing (official PDF) ↗ Open in the Patent Tracker

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Summaries are simplified from the filing’s own abstract and first claim. A patent filing is not a product announcement.
Patent data and drawings: U.S. Patent and Trademark Office (USPTO). Nebula is not affiliated with or endorsed by the USPTO.