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Samsung patents particle beam detector for material analysis

Patent drawing
Patent drawing from the official filing.

Samsung describes a device that fires two streams of charged particles at a target with a time gap between them. The two streams have different densities, and a detector measures the particles bouncing back to analyze the target.

Why it mattersThis is a specialized tool for inspecting materials at a microscopic level, likely used in semiconductor manufacturing or research labs rather than consumer products.

In the filing’s own words

A detection apparatus includes a charged particle beam generator that generates a first charged particle beam and a second charged particle beam with a delay time therebetween, and a detector that detects reactive charged particles generated from a target irradiated with the first charged particle beam and the second charged particle beam. The first charged particle beam has a first dense structure of charged particles per unit time, and the second charged particle beam has a second dense structure different from the first dense structure per unit time.

What exactly they claim (claim 1)

1. A detection apparatus comprising: a charged particle beam generator that generates a first charged particle beam and a second charged particle beam with a delay time therebetween; and a detector that detects reactive charged particles generated from a target irradiated with the first charged particle beam and the second charged particle beam, wherein the first charged particle beam has a first dense structure of charged particles per unit time, and the second charged particle beam has a second dense structure different from the first dense structure per unit time.

Facts

Company
Samsung (SAMSUNG ELECTRONICS CO., LTD.)
Official title
DETECTION APPARATUS
Publication number
US20260331417A1
Application number
19398930
Filed
Nov 24, 2025
Published
Oct 22, 2026
Inventors
1
Claims
20

Classified under

H01J 37/244 Electricity & electronicsH01J 37/1474 Electricity & electronicsH01J 2237/24485 Electricity & electronicsH01J 2237/24495 Electricity & electronics
Read the full filing (official PDF) ↗ Open in the Patent Tracker

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Summaries are simplified from the filing’s own abstract and first claim. A patent filing is not a product announcement.
Patent data and drawings: U.S. Patent and Trademark Office (USPTO). Nebula is not affiliated with or endorsed by the USPTO.