Samsung patents method for mixing chip polishing slurry on demand

1. A method of chemical mechanical polishing a substrate using a chemical mechanical polishing apparatus, comprising: determining a flow rate of a slurry to be prepared using mixing ratio data of slurry; calculating a flow rate of a slurry stock solution, a flow rate of a hydrogen peroxide, a flow rate of a deionized (DI) water, and a flow rate of an additive for preparing the slurry using the flow rate of the slurry; supplying the slurry stock solution to a mixer of the chemical mechanical polishing apparatus from a slurry stock solution supply device disposed outside the chemical mechanical polishing apparatus through a supply line connecting the chemical mechanical polishing apparatus to the slurry stock solution supply device; supplying the hydrogen peroxide, the deionized (DI) water, and the additive to the mixer from tanks disposed inside the chemical mechanical polishing apparatus through a plurality of supply pipes connecting the mixer to the tanks configured to store at least one of the hydrogen peroxide, the deionized (DI) water, and the additive; mixing, by the mixer, the slurry stock solution, and the hydrogen peroxide, the deionized (DI) water, and the additive with each other to prepare the slurry; and supplying the slurry to a polishing pad to chemically and mechanically polish the substrate, wherein the supplying of the slurry stock solution to the mixer includes controlling a first valve disposed on the supply line and a first flow rate controller disposed on a first supply pipe connecting the supply line to the mixer, and the supplying of the hydrogen peroxide, the deionized (DI) water, and the additive to the mixer includes controlling a second flow rate controller disposed on a second supply pipe connecting a hydrogen peroxide storage tank to the mixer, a third flow rate controller disposed on a third supply pipe connecting a deionized (DI) water storage tank to the mixer, and a fourth flow rate controller disposed on a fourth supply pipe connecting an additive storage tank to the mixer.