Samsung patents tool that checks chips by measuring electrical resistance
Samsung has filed a patent for a machine that tests thin material sheets, known as substrates, used in electronics. The device places two electrical probes on opposite sides of the sheet and measures the electrical resistance, or impedance, between them to check for defects.
In the filing’s own words
Provided is a substrate inspection apparatus configured to inspect a substrate, the substrate inspection apparatus including a first probe on an upper portion of the substrate, a second probe on a lower portion of the substrate opposite to the first probe, the second probe being configured to have a polarity opposite to that of the first probe, and an impedance analyzer configured to measure an impedance by at least one of a current applied to the first probe and the second probe and a voltage applied to the first probe and the second probe.
What exactly they claim (claim 1)
1. A substrate inspection apparatus configured to inspect a substrate, the substrate inspection apparatus comprising: a first probe on an upper portion of the substrate; a second probe on a lower portion of the substrate opposite to the first probe, a polarity of the second probe being opposite to a polarity of the first probe; and an impedance analyzer configured to measure an impedance by at least one of a current applied to the first probe and the second probe and a voltage applied to the first probe and the second probe.
Facts
- Company
- Samsung (SAMSUNG ELECTRONICS CO., LTD.)
- Official title
- SUBSTRATE INSPECTION APPARATUS
- Publication number
- US20260309658A1
- Application number
- 19576589
- Filed
- Mar 24, 2026
- Published
- Oct 8, 2026
- Inventors
- 5
- Claims
- 20
Classified under
G01N 27/02 Physics & computingMore from Samsung in Chips & hardware
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Summaries are simplified from the filing’s own abstract and first claim. A patent filing is not a product announcement.
Patent data and drawings: U.S. Patent and Trademark Office (USPTO). Nebula is not affiliated with or endorsed by the USPTO.
