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Microsoft patents vacuum-gap chip part for quieter quantum signal reading

Patent drawing
Patent drawing from the official filing.

Microsoft describes a device that boosts weak microwave signals used in quantum computers. It uses a superconducting wire and a ground plane separated by a tiny vacuum gap to amplify signals with very little added noise.

Why it mattersThis design aims to help scientists measure quantum states more accurately by reducing background noise in the signal.

In the filing’s own words

An improved kinetic inductance travelling-wave parametric amplifier (KTWPA) device is provided that includes a first substrate, a superconducting trace having a first height, the superconducting trace fabricated on the first substrate, a plurality of spacers having a second height, each of the plurality of spacers fabricated on the first substrate, the second height greater than the first height of the superconducting trace, a ground plane bonded to a second substrate, the ground plane further bonded to the plurality of spacers, and a vacuum gap formed between the first substrate and the ground plane. A superconducting transmission line assembly is formed by the superconducting trace and the ground plane separated by the vacuum gap having the second height. The KTWPA device is applied in a quantum microwave measurement circuit for amplifying weak quantum microwave signals at a very low noise floor.

What exactly they claim (claim 1)

1. A kinetic inductance travelling-wave parametric amplifier (KTWPA) device, the KTWPA device comprising: a first substrate; a superconducting trace having a first height fabricated on the first substrate; a plurality of spacers having a second height, each of the plurality of spacers fabricated on the first substrate, the second height being greater than the first height of the superconducting trace; a ground plane coupled to a second substrate and the plurality of spacers, and a vacuum gap formed between the first substrate and the ground plane, wherein a superconducting transmission line assembly is formed from the superconducting trace and the ground plane separated by the vacuum gap having the second height.

Facts

Company
Microsoft (Microsoft Technology Licensing, LLC)
Official title
KINETIC INDUCTANCE TRAVELLING-WAVE PARAMETRIC AMPLIFIER (KTWPA) WITH VACUUM GAP
Publication number
US20260303045A1
Application number
19096041
Filed
Mar 31, 2025
Published
Oct 1, 2026
Inventors
3
Claims
20

Classified under

H03F 7/02 Electricity & electronicsH03F 19/00 Electricity & electronics

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Summaries are simplified from the filing’s own abstract and first claim. A patent filing is not a product announcement.
Patent data and drawings: U.S. Patent and Trademark Office (USPTO). Nebula is not affiliated with or endorsed by the USPTO.