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Samsung patents magnetic shower head for chip-making plasma tools

Patent drawing from the official filing.

Samsung has filed a patent application for a specific type of shower head used in plasma processing equipment to manufacture semiconductor devices. The design uses a magnetic coupling device to attach the upper electrode to a support member, replacing traditional mechanical fasteners. This setup allows the electrode to be securely held in place while exposed to plasma during the chip-making process.

Why it mattersThis is a routine hardware improvement for semiconductor manufacturing equipment, focusing on how internal components are physically connected rather than a new consumer feature.

In the filing’s own words

Provided are a shower head and a plasma processing apparatus including the same and a method of manufacturing a semiconductor device. The shower head includes an upper electrode having a first surface exposed to plasma and a second surface opposite to the first surface; a support member having a coupling surface opposing the second surface of the upper electrode; and a magnetic coupling device disposed on the second surface of the upper electrode and the coupling surface of the support member and magnetically coupling the upper electrode to the support member.

What exactly they claim (claim 1)

1. A shower head, comprising: an upper electrode having a first surface exposed to plasma and a second surface opposite to the first surface; a support member having a coupling surface opposing the second surface of the upper electrode; and a magnetic coupling device disposed on the second surface of the upper electrode and the coupling surface of the support member and magnetically coupling the upper electrode to the support member.

Facts

Company: Samsung (SAMSUNG ELECTRONICS CO., LTD.)
Official title: SHOWER HEAD AND PLASMA PROCESSING APPARATUS INCLUDING THE SAME AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
Publication number: US20260302138A1
Application number: 19423520
Filed: Dec 17, 2025
Published: Oct 1, 2026
Inventors: 2
Claims: 20

Classified under

H01J 37/3244 Electricity & electronicsH01J 37/32522 Electricity & electronicsH01J 2237/002 Electricity & electronics

Read the full filing (official PDF) ↗ Open in the Patent Tracker

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Summaries are simplified from the filing’s own abstract and first claim. A patent filing is not a product announcement.
Patent data and drawings: U.S. Patent and Trademark Office (USPTO). Nebula is not affiliated with or endorsed by the USPTO.