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Samsung patents chip package design using trench-filled insulation

Samsung describes a method for building a semiconductor package by stacking one chip on top of another. The design involves cutting a trench into the lower chip's wiring and filling it with an insulating layer that also covers the side of the upper chip.

Why it mattersThis filing details a specific manufacturing technique for stacking chips, which is a standard approach in the industry to make processors smaller and more efficient.

In the filing’s own words

Provided is a semiconductor package including a first semiconductor device including a first semiconductor substrate, a first interconnect structure on the first semiconductor substrate, and a trench extending into the first interconnect structure and a portion of the first semiconductor substrate, a second semiconductor device on the first semiconductor device, and a cover insulating layer on the first semiconductor device and a side surface of the second semiconductor device, the cover insulating layer including a first portion filling the trench included in the first semiconductor device and contacting the first semiconductor substrate.

What exactly they claim (claim 1)

1. A method of manufacturing a semiconductor package, the method comprising: providing a wafer-level structure comprising a first semiconductor substrate and a first interconnect structure on the first semiconductor substrate; forming a trench in the wafer-level structure, the trench extending into the first interconnect structure and a portion of the first semiconductor substrate; bonding a second semiconductor device to the wafer-level structure; and forming a cover insulating layer on the wafer-level structure and on a side surface of the second semiconductor device, wherein the forming of the cover insulating layer comprises filling the trench with a first portion of the cover insulating layer, and wherein the first portion of the cover insulating layer contacts the first semiconductor substrate.

Facts

Company
Samsung (SAMSUNG ELECTRONICS CO., LTD.)
Official title
SEMICONDUCTOR PACKAGE WITH SEMICONDUCTOR DEVICES
Publication number
US20260293752A1
Application number
19687858
Filed
May 26, 2026
Published
Sep 24, 2026
Inventors
4
Claims
20

Classified under

H10W 74/134 Electricity & electronicsH10W 72/20 Electricity & electronicsH10W 72/90 Electricity & electronicsH10W 74/43 Electricity & electronicsH10W 90/00 Electricity & electronicsH10B 80/00 Electricity & electronics

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Summaries are simplified from the filing’s own abstract and first claim. A patent filing is not a product announcement.
Patent data and drawings: U.S. Patent and Trademark Office (USPTO). Nebula is not affiliated with or endorsed by the USPTO.