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Samsung patents chip layout that routes power from the back of the silicon

Samsung describes a method for designing semiconductor chips where power connections are routed through the back of the silicon wafer. The design places specific power tap cells in rows that use vertical connections to link a power network on the back side to power rails on the front side.

Why it mattersThis layout technique helps manage power delivery in advanced chips, which is a standard engineering step for improving efficiency in modern processors.

In the filing’s own words

A method of manufacturing a semiconductor device includes designing a layout of the semiconductor device based on a circuit design, and manufacturing the semiconductor device based on the designed layout, the designing of the layout including placing a first power rail and a second power rail that extend in a first direction and are spaced apart from each other, placing a power tap cell continuously in a first row, a second row adjacent to the first row, and a third row adjacent to the second row, and placing a power delivery network on the second side of the substrate, the power tap cell including a first power through via that penetrates the substrate and extends from the power delivery network to the first power rail, and a second power through via that penetrates the substrate and extends from the power delivery network to the second power rail.

What exactly they claim (claim 1)

1. A method of manufacturing a semiconductor device, comprising: designing a layout of the semiconductor device based on a circuit design; and manufacturing the semiconductor device based on the designed layout, wherein the designing of the layout comprises: placing a first power rail and a second power rail that extend in a first direction and are spaced apart from each other in a second direction, on a first side of a substrate comprising the first side and a second side that are opposite to each other; placing a power tap cell continuously in a first row, a second row adjacent to the first row, and a third row adjacent to the second row, on the first side of the substrate; and placing a power delivery network on the second side of the substrate, wherein the power tap cell comprises a first power through via that penetrates the substrate and extends from the power delivery network to the first power rail, and a second power through via that penetrates the substrate and extends from the power delivery network to the second power rail.

Facts

Company
Samsung (Samsung Electronics Co., Ltd.)
Official title
SEMICONDUCTOR DEVICE
Publication number
US20260293645A1
Application number
19694677
Filed
Jun 1, 2026
Published
Sep 24, 2026
Inventors
5
Claims
20

Classified under

H10W 20/427 Electricity & electronicsG06F 30/31 Physics & computingH10D 30/43 Electricity & electronicsH10D 30/6735 Electricity & electronicsH10D 62/121 Electricity & electronicsH10D 84/85 Electricity & electronics

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Summaries are simplified from the filing’s own abstract and first claim. A patent filing is not a product announcement.
Patent data and drawings: U.S. Patent and Trademark Office (USPTO). Nebula is not affiliated with or endorsed by the USPTO.