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Samsung patents laser-based tool to inspect objects using terahertz waves

Samsung has filed a patent for an inspection device that uses lasers to create plasma in a small gap. This setup allows the device to detect terahertz signals reflected from an object, which can reveal details about its structure or material.

Why it mattersThis technology could improve how manufacturers check the quality of electronic components or materials without damaging them.

In the filing’s own words

An inspection apparatus includes a substrate extending in a first direction and a second direction perpendicular to the first direction, a receiver antenna arranged on the substrate and including first and second antenna electrodes, a first waveguide on the substrate, and a second waveguide on the substrate, wherein the first antenna electrode overlaps the first waveguide in a third direction that is perpendicular to the first direction and the second direction, and the second antenna electrode overlaps the second waveguide in the third direction.

What exactly they claim (claim 1)

1. An inspection apparatus comprising: a receiver antenna including a first antenna electrode and a second antenna electrode, the first and second antenna electrodes arranged apart from each other with a gap therebetween; a first waveguide adjacent to the gap; and a second waveguide adjacent to the gap, wherein the receiver antenna is configured to generate plasma in the gap and couple the plasma with a terahertz band signal from an inspection object, wherein the first waveguide is configured to introduce a first laser beam with a first frequency into the gap, and wherein the second waveguide is configured to transfer a second laser beam with a second frequency, the second laser beam being generated in response to the plasma, the terahertz band signal, and the first laser beam.

Facts

Company
Samsung (Samsung Electronics Co., Ltd.)
Official title
PROBE AND INSPECTION APPARATUS INCLUDING THE SAME
Publication number
US20260287503A1
Application number
19687265
Filed
May 26, 2026
Published
Sep 24, 2026
Inventors
9
Claims
20

Classified under

G01N 21/3581 Physics & computingG01N 21/956 Physics & computingG01N 2021/95676 Physics & computing
Read the full filing (official PDF) ↗ Open in the Patent Tracker

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Summaries are simplified from the filing’s own abstract and first claim. A patent filing is not a product announcement.
Patent data and drawings: U.S. Patent and Trademark Office (USPTO). Nebula is not affiliated with or endorsed by the USPTO.