Samsung patents chip design with uneven dummy pads to protect wiring
Samsung has filed a patent for a semiconductor device that includes both active connection pads and inactive dummy pads. The design specifies that the bottom of the dummy pad sits higher than the active pad and has a stepped surface with multiple levels.
In the filing’s own words
Provided is a semiconductor device including a semiconductor structure including a semiconductor substrate and a semiconductor element layer, a wiring structure on the semiconductor structure, a bonding dielectric layer on the wiring structure, a connection pad penetrating the bonding dielectric layer from a top surface of the bonding dielectric layer in a downward direction and having sidewalls surrounded by the bonding dielectric layer, and a dummy pad penetrating at least a portion of the bonding dielectric layer from the top surface of the bonding dielectric layer in the downward direction and having sidewalls surrounded by the bonding dielectric layer, wherein a bottom surface of the dummy pad is at a higher vertical level than a bottom surface of the connection pad, and the bottom surface of the dummy pad includes a plurality of surfaces at different vertical levels.
What exactly they claim (claim 1)
1. A semiconductor device comprising: a semiconductor structure comprising a semiconductor substrate and a semiconductor element layer; a wiring structure on the semiconductor structure; a bonding dielectric layer on the wiring structure; a connection pad penetrating the bonding dielectric layer from a top surface of the bonding dielectric layer in a downward direction and having sidewalls surrounded by the bonding dielectric layer; and a dummy pad penetrating at least a portion of the bonding dielectric layer from the top surface of the bonding dielectric layer in the downward direction and having sidewalls surrounded by the bonding dielectric layer, wherein a bottom surface of the dummy pad is at a higher vertical level than a bottom surface of the connection pad, and wherein the bottom surface of the dummy pad comprises a plurality of surfaces at different vertical levels.
Facts
- Company
- Samsung (SAMSUNG ELECTRONICS CO., LTD.)
- Official title
- SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
- Publication number
- US20260282998A1
- Application number
- 19421627
- Filed
- Dec 16, 2025
- Published
- Sep 17, 2026
- Inventors
- 2
- Claims
- 20
Classified under
H10W 72/963 Electricity & electronicsH10B 80/00 Electricity & electronicsH10W 72/01935 Electricity & electronicsH10W 90/20 Electricity & electronicsH10W 90/792 Electricity & electronicsMore from Samsung in Chips & hardware
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Summaries are simplified from the filing’s own abstract and first claim. A patent filing is not a product announcement.
Patent data and drawings: U.S. Patent and Trademark Office (USPTO). Nebula is not affiliated with or endorsed by the USPTO.