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GooglePatent applicationChips & hardwareInterest 3/10

Google patents chip-making method that adjusts steps based on real-time measurements

This filing describes a system for making computer chips that measures the size of tiny holes after they are created. It then uses that measurement to adjust how much material is added in the next step, ensuring the final structure matches the design. The process involves depositing metal layers and growing an oxide layer between them.

Why it mattersIt improves the precision of chip manufacturing by correcting for small variations during production, which is a standard engineering approach for making reliable hardware.

In the filing’s own words

A method includes: forming an opening in a mask layer; measuring a feature size associated with a dimension of the opening; based on the feature size, determining a fabrication parameter; and forming a second layer in the opening. Forming the second layer is based on the fabrication parameter. A fabrication system includes a lithography system; a measurement system; a physical vapor deposition system; an oxidation system; and a control system. The control system is configured to control a feed-forward fabrication process.

What exactly they claim (claim 1)

1. A fabrication system comprising: a lithography system; a measurement system; a physical vapor deposition system; an oxidation system; and a control system, wherein the control system is configured to perform operations comprising: causing the lithography system to form an opening in a mask layer; causing the measurement system to measure a feature size associated with a dimension of the opening; based on the feature size, determining an oxide growth parameter; causing the physical vapor deposition system to deposit a first metal layer in the opening; causing the oxidation system to oxidize a portion of the first metal layer based on the oxide growth parameter, to form an oxide layer on the first metal layer; and causing the physical vapor deposition system to deposit a second metal layer on the oxide layer.

Facts

Company
Google (Google LLC)
Official title
FEED-FORWARD DEVICE FABRICATION
Publication number
US20260282844A1
Application number
19668137
Filed
May 5, 2026
Published
Sep 17, 2026
Inventors
1
Claims
4

Classified under

H10P 74/203 Electricity & electronicsH10N 60/0912 Electricity & electronicsH10P 72/0474 Electricity & electronics
Read the full filing (official PDF) ↗ Open in the Patent Tracker

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Summaries are simplified from the filing’s own abstract and first claim. A patent filing is not a product announcement.
Patent data and drawings: U.S. Patent and Trademark Office (USPTO). Nebula is not affiliated with or endorsed by the USPTO.