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Samsung patents stacked capacitor design for memory chips

Samsung has filed a patent for a specific way to build capacitors inside semiconductor devices. The design uses two separate sets of capacitor layers, each with its own lower and upper electrodes and insulating material, stacked on contact points within the chip.

Why it mattersThis is a detailed engineering update that could help manufacturers pack more storage into memory chips by optimizing how these tiny electrical components are arranged.

In the filing’s own words

A capacitor structure includes a first lower conductive pattern, a first capacitor, a first upper conductive pattern, a second lower conductive pattern, a second capacitor and a second upper conductive pattern. The first capacitor includes first lower electrodes, first upper electrodes and first dielectric structures. Each of the first dielectric structures are disposed between one of the first lower electrodes and a corresponding one of the first upper electrodes. The first upper conductive pattern is formed on and is electrically connected to the first upper electrodes. The second lower conductive pattern is spaced apart from the first lower conductive pattern disposed on the substrate. The second capacitor includes second lower electrodes, second upper electrodes and second dielectric structures. The second upper conductive pattern is formed on and is electrically connected to the second upper electrodes. The first and second conductive patterns are electrically insulated from each other.

What exactly they claim (claim 1)

1. A semiconductor device, comprising: active patterns disposed on a substrate; gate structures spaced apart from each other in a second direction that is substantially parallel to an upper surface of the substrate, each of the gate structures extending in upper portions of the active patterns in a first direction that is substantially parallel to the upper surface of the substrate and substantially perpendicular to the second direction; bit line structures spaced apart from each other in the first direction, each of the bit line structures extending in the second direction on central portions of corresponding ones of the active patterns; contact plug structures disposed on opposite end portions of the active patterns; and capacitors disposed on the contact plug structures, respectively, wherein: the contact plug structures include first contact plugs and second contact plugs, the capacitors include a first capacitor and a second capacitor, the first capacitor includes: first lower electrodes spaced apart from each other on a corresponding one of the first contact plugs in a horizontal direction that is substantially parallel to an upper surface of the substrate, the first lower electrodes being electrically connected to the corresponding one of the first contact plugs; first upper electrodes disposed in a space between the first lower electrodes and further disposed in a space adjacent to one of the first lower electrodes that is disposed at a first end portion; and first dielectric structures each being disposed between one of the first lower electrodes and a corresponding one of the first upper electrodes, the second capacitor includes: second lower electrodes spaced apart from each other on a corresponding one of the second contact plugs in the horizontal direction, the second lower electrodes being electrically connected to the corresponding one of the second contact plugs; second upper electrodes disposed in a space between the second lower electrodes and further disposed in a space adjacent to one of the second lower electrodes that is disposed at a first end portion; and second dielectric structures each being disposed between one of the second lower electrodes and a corresponding one of the second upper electrodes, wherein a first upper conductive pattern is disposed on and is electrically connected to the first upper electrodes, and a second conductive pattern is disposed on and is electrically connected to the second upper electrodes, and wherein the first and second conductive patterns are electrically insulated from each other.

Facts

Company
Samsung (SAMSUNG ELECTRONICS CO., LTD.)
Official title
CAPACITOR STRUCTURE AND SEMICONDUCTOR DEVICE INCLUDING THE SAME
Publication number
US20260282403A1
Application number
19668073
Filed
May 5, 2026
Published
Sep 17, 2026
Inventors
4
Claims
20

Classified under

H10D 1/043 Electricity & electronicsH10B 12/0335 Electricity & electronicsH10B 12/315 Electricity & electronicsH10D 1/716 Electricity & electronics

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Summaries are simplified from the filing’s own abstract and first claim. A patent filing is not a product announcement.
Patent data and drawings: U.S. Patent and Trademark Office (USPTO). Nebula is not affiliated with or endorsed by the USPTO.