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Samsung patents capacitor design using doped metal oxides

Samsung describes a method for building a capacitor, a component that stores electrical charge, by creating a lower electrode from a specific metal oxide mixed with other metals. The filing details how to layer a dielectric material and an upper electrode onto the sides of this base structure to form the final component.

Why it mattersThis is a routine improvement in semiconductor manufacturing that aims to refine how capacitors are built inside chips.

In the filing’s own words

A capacitor structure includes a lower electrode structure disposed on a substrate, including an oxide of a first metal having 4 valence electrons, and being doped with a second metal having 3, 5, 6, or 7 valence electrons, a dielectric pattern disposed on a sidewall of the lower electrode structure, and an upper electrode disposed on a sidewall of the dielectric pattern.

What exactly they claim (claim 1)

1. A method of forming a capacitor structure, the method comprising: forming a lower electrode structure disposed on a substrate, the lower electrode structure including an oxide of a first metal having 4 valence electrons and being doped with a second metal having 3, 5, 6, or 7 valence electrons; forming a dielectric pattern disposed on a sidewall of the lower electrode structure; and forming an upper electrode disposed on a sidewall of the dielectric pattern.

Facts

Company
Samsung (SAMSUNG ELECTRONICS CO., LTD.)
Official title
CAPACITOR STRUCTURE, METHOD OF FORMING THE SAME, AND SEMICONDUCTOR DEVICE INCLUDING THE CAPACITOR STRUCTURE
Publication number
US20260282401A1
Application number
19675768
Filed
May 13, 2026
Published
Sep 17, 2026
Inventors
3
Claims
20

Classified under

H10D 1/042 Electricity & electronicsH10B 12/0335 Electricity & electronicsH10B 12/315 Electricity & electronicsH10D 1/696 Electricity & electronicsH10D 1/716 Electricity & electronics

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Summaries are simplified from the filing’s own abstract and first claim. A patent filing is not a product announcement.
Patent data and drawings: U.S. Patent and Trademark Office (USPTO). Nebula is not affiliated with or endorsed by the USPTO.