Samsung patents electron microscope with polygonal beam columns
Samsung has filed a patent for a charged particle beam device, which is a type of high-resolution microscope used to examine tiny materials. The design features multiple electron beam columns with a polygonal shape, each surrounded by a shielding cover, that scan a sample inside a chamber to detect emitted electrons.
In the filing’s own words
A charged particle beam device according to some implementations of the present disclosure comprises: a plurality of columns, a plurality of shielding covers, a chamber, and a detector. Each of the plurality of columns is configured to scan an electron beam on a sample. Each of the plurality of shielding covers surrounds a respective one of the plurality of columns. The chamber is coupled to the plurality of columns, and includes a stage that supports the sample and is disposed apart from ends of the plurality of columns. The detector is configured to detect electrons emitted from the sample. Each of the plurality of columns has a polygonal shape in a plan view.
What exactly they claim (claim 1)
1. A charged particle beam device comprising: a plurality of columns, wherein each column of the plurality of columns is configured to scan an electron beam on a sample; a plurality of shielding covers respectively surrounding each column of the plurality of columns; a chamber coupled to the plurality of columns, the chamber comprising a stage configured to support the sample, wherein the stage is apart from ends of the plurality of columns; and a detector configured to detect electrons emitted from the sample, wherein each column of the plurality of columns has a polygonal shape in a plan view.
Facts
- Company
- Samsung (Samsung Electronics Co., Ltd.)
- Official title
- CHARGED PARTICLE BEAM DEVICE
- Publication number
- US20260279717A1
- Application number
- 19338796
- Filed
- Sep 24, 2025
- Published
- Sep 17, 2026
- Inventors
- 6
- Claims
- 20
Classified under
H01J 37/09 Electricity & electronicsH01J 37/244 Electricity & electronicsH01J 37/265 Electricity & electronicsH01J 2237/24475 Electricity & electronicsH01J 2237/2448 Electricity & electronicsH01J 2237/2817 Electricity & electronicsMore from Samsung in Chips & hardware
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Summaries are simplified from the filing’s own abstract and first claim. A patent filing is not a product announcement.
Patent data and drawings: U.S. Patent and Trademark Office (USPTO). Nebula is not affiliated with or endorsed by the USPTO.