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Samsung patents water system with automated valve for chip manufacturing

Samsung describes a facility for making ultrapure water, which is essential for cleaning microchips. The system uses a series of filters and a special valve that opens or closes automatically using air pressure to control the water flow.

Why it mattersThis is a specific engineering design for the internal plumbing of a chip factory, ensuring the water used to clean wafers is consistently clean.

In the filing’s own words

An ultrapure water manufacturing facility includes: a supply line connected to a pure water storage tank and in which a plurality of pure water treatment devices are sequentially arranged; a branch line branched downstream of the supply line and connected to the pure water storage tank; and a first automatic valve connected to the branch line and configured to be actuated by a double-acting actuator.

What exactly they claim (claim 1)

1. An ultrapure water manufacturing facility comprising: a pure water storage tank; a supply line connected to the pure water storage tank; a plurality of pure water treatment devices sequentially arranged on the supply line downstream of the pure water storage tank, the plurality of pure water treatment devices including a heat exchanger, an ultraviolet sterilizer, a first polisher, a degasifier, a second polisher, and a filtration membrane sequentially arranged on the supply line; a branch line branched from the supply line downstream of the filtration membrane and connected to the pure water storage tank; a first automatic valve connected to the branch line and located upstream of the pure water storage tank on the branch line; and a double-acting actuator arranged to actuate the first automatic valve, wherein the double-acting actuator comprises a first power port and a second power port, and wherein the double-acting actuator is configured to open the first automatic valve in response to power being supplied to the first power port and to close the first automatic valve in response to power being supplied to the second power port.

Facts

Company
Samsung (Samsung Electronics Co., Ltd.)
Official title
ULTRAPURE WATER PRODUCTION FACILITY
Publication number
US20260274730A1
Application number
19667360
Filed
May 4, 2026
Published
Sep 17, 2026
Inventors
4
Claims
20

Classified under

C02F 9/00 Chemistry & metalsC02F 2201/005 Chemistry & metalsC02F 2203/006 Chemistry & metalsC02F 2209/003 Chemistry & metals
Read the full filing (official PDF) ↗ Open in the Patent Tracker

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Summaries are simplified from the filing’s own abstract and first claim. A patent filing is not a product announcement.
Patent data and drawings: U.S. Patent and Trademark Office (USPTO). Nebula is not affiliated with or endorsed by the USPTO.