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Samsung patents chip design with uneven metal layers around nanosheets

Samsung describes a microchip structure that combines traditional fin-shaped silicon with newer nanosheet layers. The design uses a metal gate layer that is thicker on the top of the nanosheets than on their sides to control the flow of electricity.

Why it mattersThis is a routine improvement in chip manufacturing that helps engineers build smaller, more efficient processors for phones and computers.

In the filing’s own words

An integrated circuit device includes a fin-type active region extending in a first horizontal direction, a nanosheet stack apart in a vertical direction from a fin top surface of the fin-type active region and including a plurality of nanosheets vertically overlapping the fin top surface, a device isolation film covering sidewalls of the fin-type active region, and a gate line extending in a second horizontal direction on the fin-type active region and the device isolation film and including a work-function metal-containing structure surrounding the nanosheets, wherein the second horizontal direction intersects the first horizontal direction, wherein a first thickness in the vertical direction of a portion of the work-function metal-containing structure, which covers a top surface of the nanosheet stack, is greater than a second thickness in the second horizontal direction of a portion of the work-function metal-containing structure, which covers a sidewall of the nanosheet stack.

What exactly they claim (claim 1)

1. An integrated circuit device comprising: a fin-type active region extending in a first horizontal direction; a nanosheet stack spaced apart in a vertical direction from a fin top surface of the fin-type active region, the nanosheet stack comprising a plurality of nanosheets vertically overlapping the fin top surface of the fin-type active region; a device isolation film covering sidewalls of the fin-type active region; and a gate line extending in a second horizontal direction on the fin-type active region and the device isolation film, the gate line comprising a work-function metal-containing structure surrounding the plurality of nanosheets, wherein the second horizontal direction intersects the first horizontal direction, wherein a first thickness in the vertical direction of a portion of the work-function metal-containing structure, which covers a top surface of the nanosheet stack, is greater than a second thickness in the second horizontal direction of a portion of the work-function metal-containing structure, which covers a sidewall of the nanosheet stack.

Facts

Company
Samsung (Samsung Electronics Co., Ltd.)
Official title
INTEGRATED CIRCUIT DEVICE
Publication number
US20260271392A1
Application number
19330287
Filed
Sep 16, 2025
Published
Sep 10, 2026
Inventors
3
Claims
20

Classified under

H10D 84/851 Electricity & electronicsH10D 84/0177 Electricity & electronicsH10D 84/83135 Electricity & electronics

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Summaries are simplified from the filing’s own abstract and first claim. A patent filing is not a product announcement.
Patent data and drawings: U.S. Patent and Trademark Office (USPTO). Nebula is not affiliated with or endorsed by the USPTO.