Samsung patents stacked memory chips with dummy plugs for better alignment
Samsung describes a method for stacking two semiconductor layers vertically to create a memory device. The design uses non-functional 'dummy' plugs and spacers to align the top layer with the bottom layer during assembly.
In the filing’s own words
Some embodiments provide a semiconductor device including a first structure including a substrate; and a second structure vertically overlapping the first structure and bonded to the first structure, wherein the first structure includes a memory cell structure disposed on the substrate; a first dummy plug spaced apart from the memory cell structure, electrically isolated from the memory cell structure, and extending in a vertical direction, on the substrate; and a first dummy interconnection structure connected to the first dummy plug, on the first dummy plug, and the second structure includes a semiconductor body; a second dummy plug penetrating the semiconductor body and connected to the first dummy interconnection structure; and an insulating spacer disposed between the semiconductor body and the second dummy plug.
What exactly they claim (claim 1)
1. A semiconductor device comprising: a first structure including a substrate; and a second structure vertically overlapping the first structure and bonded to the first structure, wherein the first structure includes: a memory cell structure on the substrate; a first dummy plug spaced apart from the memory cell structure, electrically isolated from the memory cell structure, and extending in a vertical direction, on the substrate; and a first dummy interconnection structure connected to the first dummy plug, on the first dummy plug, and the second structure includes: a semiconductor body; a second dummy plug penetrating the semiconductor body and connected to the first dummy interconnection structure; and an insulating spacer between the semiconductor body and the second dummy plug.
Facts
- Company
- Samsung (Samsung Electronics Co., Ltd.)
- Official title
- SEMICONDUCTOR DEVICE INCLUDING FIRST AND SECOND STRUCTURES IN VERTICAL ARRANGEMENT
- Publication number
- US20260271280A1
- Application number
- 19555610
- Filed
- Mar 3, 2026
- Published
- Sep 10, 2026
- Inventors
- 2
- Claims
- 20
Classified under
H10B 12/50 Electricity & electronicsH10B 12/09 Electricity & electronicsH10B 12/30 Electricity & electronicsMore from Samsung in Chips & hardware
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Summaries are simplified from the filing’s own abstract and first claim. A patent filing is not a product announcement.
Patent data and drawings: U.S. Patent and Trademark Office (USPTO). Nebula is not affiliated with or endorsed by the USPTO.