Samsung patents layered metal stack to lower chip resistance
Samsung describes a specific arrangement of metal layers used inside semiconductor devices to reduce electrical resistance. The design uses a special "insertion" layer made of a silicide nitride material between different metal conductive layers. This structure aims to improve how electricity flows through the tiny connections in a chip.
In the filing’s own words
There is provided a conductive stack with reduced electrical resistance. The conductive stack includes a lower conductive layer, a barrier conductive layer on the lower conductive layer, an insertion layer on the barrier conductive layer, including a silicide nitride of a first metal element, a first upper conductive layer on the insertion layer, including the first metal element and a second upper conductive layer on the first upper conductive layer, including a second metal element different from the first metal element.
What exactly they claim (claim 1)
1. A conductive stack comprising: a lower conductive layer; a barrier conductive layer on the lower conductive layer; an insertion layer on the barrier conductive layer, including a silicide nitride of a first metal element; a first upper conductive layer on the insertion layer, including the first metal element; and a second upper conductive layer on the first upper conductive layer, including a second metal element different from the first metal element.
Facts
- Company
- Samsung (Samsung Electronics Co., Ltd.)
- Official title
- CONDUCTIVE STACK AND SEMICONDUCTOR DEVICE INCLUDING THE SAME
- Publication number
- US20260271269A1
- Application number
- 19559100
- Filed
- Mar 6, 2026
- Published
- Sep 10, 2026
- Inventors
- 5
- Claims
- 20
Classified under
H10B 12/315 Electricity & electronicsH10D 64/251 Electricity & electronicsMore from Samsung in Chips & hardware
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Summaries are simplified from the filing’s own abstract and first claim. A patent filing is not a product announcement.
Patent data and drawings: U.S. Patent and Trademark Office (USPTO). Nebula is not affiliated with or endorsed by the USPTO.