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Samsung patents chip design that blocks unwanted electrical connections

Patent drawing
Patent drawing from the official filing.

This patent describes a specific layout for a semiconductor transistor that uses a physical barrier to control where electrical contacts can be made. By placing a blocking pattern under one of the source/drain regions, the design ensures that the electrical connection stops at a precise depth, preventing it from extending too far down into the chip.

Why it mattersThis is a routine improvement in chip manufacturing that helps engineers build smaller, more reliable transistors by preventing electrical shorts during the production process.

In the filing’s own words

A semiconductor device includes a substrate, a first sheet pattern on the substrate, a gate electrode on the substrate and surrounding the first sheet pattern, a first source/drain pattern and a second source/drain pattern respectively connected to a first end and a second end of the first sheet pattern, a contact blocking pattern on a lower side of the second source/drain pattern, a first source/drain contact extending in a first direction and connected to the first source/drain pattern, and a second source/drain contact connected to the second source/drain pattern and extending in the first direction to contact an upper surface of the contact blocking pattern. A depth from an upper surface of the gate electrode to a lowermost portion of the first source/drain contact may be greater than a depth from the upper surface of the gate electrode to the upper surface of the contact blocking pattern.

What exactly they claim (claim 1)

1. A semiconductor device comprising: a substrate including an upper surface and a lower surface that are opposite each other in a first direction; a first sheet pattern on the upper surface of the substrate, the first sheet pattern including a first end and a second end; a gate electrode extending in a second direction on the upper surface of the substrate, the gate electrode surrounding the first sheet pattern; a first source/drain pattern connected to the first end of the first sheet pattern; a second source/drain pattern connected to the second end of the first sheet pattern; a contact blocking pattern on a lower side of the second source/drain pattern, the contact blocking pattern including an upper surface and a lower surface that are opposite each other in the first direction; a first source/drain contact extending in the first direction, the first source/drain contact being connected to the first source/drain pattern; and a second source/drain contact in contact with the upper surface of the contact blocking pattern, the second source/drain contact extending in the first direction, and the second source/drain contact being connected to the second source/drain pattern, wherein a depth from an upper surface of the gate electrode to a lowermost portion of the first source/drain contact is greater than a depth from the upper surface of the gate electrode to the upper surface of the contact blocking pattern.

Facts

Company
Samsung (Samsung Electronics Co., Ltd.)
Official title
Semiconductor device
Patent number
US12772498B2
Application number
18334849
Filed
Jun 14, 2023
Granted
Oct 20, 2026
Inventors
5
Claims
20

Classified under

H10D 30/6729 Electricity & electronicsH10D 30/43 Electricity & electronicsH10D 30/6735 Electricity & electronicsH10D 30/6757 Electricity & electronicsH10D 62/121 Electricity & electronicsH10W 20/20 Electricity & electronics

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Summaries are simplified from the filing’s own abstract and first claim. A patent filing is not a product announcement.
Patent data and drawings: U.S. Patent and Trademark Office (USPTO). Nebula is not affiliated with or endorsed by the USPTO.