Samsung patents water system that removes boron for chip making
Samsung has been granted a patent for a facility that produces ultrapure water by filtering it through multiple layers of reverse osmosis membranes and UV light. The system uses a specific resin tower to remove boron atoms and adds chemicals to adjust the water's acidity before final processing.
In the filing’s own words
An ultrapure water manufacturing facility includes: a first tank; a plurality of reverse osmosis membranes sequentially arranged downstream of the first tank; an electrodeionization device arranged downstream of the plurality of reverse osmosis membranes; an ion exchange resin tower arranged downstream of the electrodeionization device and filled with a boron selective resin; and a chemical supplier arranged between the plurality of reverse osmosis membranes and configured to supply a pH regulator to treatment-target water.
What exactly they claim (claim 1)
1. An ultrapure water manufacturing facility comprising: a first tank; a plurality of reverse osmosis membranes sequentially arranged downstream of the first tank, the plurality of reverse osmosis membranes comprising a first reverse osmosis membrane and a second reverse osmosis membrane downstream of the first reverse osmosis membrane; a second tank downstream of the first reverse osmosis membrane; a first ultraviolet (UV) sterilizer downstream of the second tank and upstream of the second reverse osmosis membrane; an electrodeionization device arranged immediately downstream of the second reverse osmosis membrane; an ion exchange resin tower arranged downstream of the electrodeionization device and filled with a boron selective resin; and a chemical supplier arranged between the plurality of reverse osmosis membranes and upstream of the first UV sterilizer, and configured to supply a pH regulator to treatment-target water flowing from the second tank to the first UV sterilizer.
Facts
- Company
- Samsung (Samsung Electronics Co., Ltd.)
- Official title
- Ultrapure water manufacturing facility
- Patent number
- US12767572B2
- Application number
- 18111160
- Filed
- Feb 17, 2023
- Granted
- Oct 20, 2026
- Inventors
- 5
- Claims
- 20
Classified under
C02F 9/00 Chemistry & metalsB01D 19/0031 Operations & transportB01D 61/026 Operations & transportB01D 61/04 Operations & transportB01D 61/06 Operations & transportC02F 1/4695 Chemistry & metalsMore from Samsung in Chips & hardware
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Summaries are simplified from the filing’s own abstract and first claim. A patent filing is not a product announcement.
Patent data and drawings: U.S. Patent and Trademark Office (USPTO). Nebula is not affiliated with or endorsed by the USPTO.