Samsung patents chip-making tool that fixes laser aiming errors
This filing describes a machine for treating computer chips that uses a laser beam while the chip spins. It includes a system that checks the laser's position against a test piece with specific patterns to ensure it hits the exact right spot.
In the filing’s own words
Provided is a control device and a substrate processing apparatus including the same. The substrate processing apparatus includes a support unit configured to support and rotate a first substrate, the support unit including a spin chuck, a spray unit configured to spray a processing fluid on the first substrate, a correction unit on a swing arm and configured to irradiate a beam onto the first substrate when the processing fluid is provided on the first substrate, wherein the swing arm is adjacent to the spin chuck and is configured to move the correction unit to a target point on the first substrate, and a controller configured to control the spin chuck and the swing arm, and correct a position error of the swing arm using a second substrate, wherein a plurality of anchor patterns are on the second substrate.
What exactly they claim (claim 1)
1. An apparatus for processing a substrate, the apparatus comprising: a support unit configured to support and rotate a first substrate, the support unit including a spin chuck; a spray unit configured to spray a processing fluid on the first substrate; a correction unit on a swing arm and configured to irradiate a beam onto the first substrate when the processing fluid is provided on the first substrate, wherein the swing arm is adjacent to the spin chuck and is configured to move the correction unit to a target point on the first substrate; and a controller configured to control the spin chuck and the swing arm, and correct a position error of the swing arm using a second substrate, wherein a plurality of anchor patterns are on the second substrate.
Facts
- Company
- Samsung (SAMSUNG ELECTRONICS CO., LTD.)
- Official title
- Control device and substrate processing apparatus including the same
- Patent number
- US12766545B2
- Application number
- 18768390
- Filed
- Jul 10, 2024
- Granted
- Oct 20, 2026
- Inventors
- 13
- Claims
- 20
Classified under
B05C 13/00 Operations & transportG05B 19/401 Physics & computingG05B 19/404 Physics & computingG06T 7/74 Physics & computingMore from Samsung in Chips & hardware
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Summaries are simplified from the filing’s own abstract and first claim. A patent filing is not a product announcement.
Patent data and drawings: U.S. Patent and Trademark Office (USPTO). Nebula is not affiliated with or endorsed by the USPTO.