Samsung patents new chemical layer to boost 2D transistor performance
Samsung describes a method for improving tiny transistors made from thin sheets of transition metal dichalcogenides (TMDs). The invention places a specific chemical dopant layer within 3 nanometers of the transistor channel to increase electrical flow, using materials like halides or hydroxides.
In the filing’s own words
A structure includes a dopant layer at or close to a channel to n-dope TMDs, wherein the dopant layer includes at least one of: at least one of halides (MX 2; M=(Ti, Zr, or Hf), X=at least one of {Cl, Br, or I}); at least one of hydroxides (M(OH) 2; M=(Ru, Os, or Ni)); Ca 4 As 4; or Zn 2 H 8 N 4 Te 2. A method for fabricating a channel includes depositing a delta-doped layer having a low dielectric constant and a band gap>0.1 eV onto a high-k layer, and n-doping a TMD layer, wherein an absolute value of ionization energy of the delta-doped layer is less than an absolute value of the electron affinity of the TMD layer, the delta-doped layer includes one of a halide, hydroxide, chalcogenide, oxide, arsenide, or multi-anion compound, and a fractional ratio of the delta-doped layer to the high-k layer is 0 to 0.3.
What exactly they claim (claim 1)
1. A structure comprising a dopant layer at or within 3 nm from a channel comprising at least one transition metal dichalcogenide to n-dope the at least one transition metal dichalcogenide, wherein the dopant layer comprises at least one of: at least one of halides represented by MX2, wherein M is Ti, Zr, or Hf, and X is at least one of CI, Br, or I.
Facts
- Company
- Samsung (SAMSUNG ELECTRONICS CO., LTD.)
- Official title
- N-type of transition metal dichalcogenide channels via surface charge transfer from a dopant layer
- Patent number
- US12765285B2
- Application number
- 18402474
- Filed
- Jan 2, 2024
- Granted
- Oct 13, 2026
- Inventors
- 2
- Claims
- 2
Classified under
H10P 32/19 Electricity & electronicsH10P 32/14 Electricity & electronicsMore from Samsung in Chips & hardware
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Summaries are simplified from the filing’s own abstract and first claim. A patent filing is not a product announcement.
Patent data and drawings: U.S. Patent and Trademark Office (USPTO). Nebula is not affiliated with or endorsed by the USPTO.