Samsung patents capacitor design with nitrogen and oxygen layers
Samsung has been granted a patent for a specific type of capacitor used inside semiconductor chips. The design features a layered structure where the top electrode includes a metal-nitrogen layer protected by a layer containing a metal, a Group 14 element, and oxygen.
In the filing’s own words
A semiconductor device includes a conductive pattern, and a capacitor electrically connected to the conductive pattern. The capacitor includes a first electrode structure electrically connected to the conductive pattern, a dielectric layer disposed on the first electrode structure, a second electrode structure disposed on the dielectric layer, and a plate electrode disposed on the second electrode structure. The second electrode structure includes a first electrode material layer including a first metal element and a nitrogen element, and a first protective material layer including a second metal element, a Group 14 element, and an oxygen element.
What exactly they claim (claim 1)
1. A semiconductor device comprising: a conductive pattern; and a capacitor electrically connected to the conductive pattern, wherein the capacitor comprises: a first electrode structure electrically connected to the conductive pattern; a dielectric layer disposed on the first electrode structure; a second electrode structure disposed on the dielectric layer; and a plate electrode disposed on the second electrode structure, wherein the second electrode structure comprises: a first electrode material layer including a first metal element and a nitrogen element; and a first protective material layer including a second metal element, a Group 14 element, and an oxygen element, wherein the first metal element and the second metal element are a same element.
Facts
- Company
- Samsung (SAMSUNG ELECTRONICS CO., LTD.)
- Official title
- Semiconductor device
- Patent number
- US12764932B2
- Application number
- 18494449
- Filed
- Oct 25, 2023
- Granted
- Oct 13, 2026
- Inventors
- 5
- Claims
- 20
Classified under
H10B 12/315 Electricity & electronicsH10B 12/033 Electricity & electronicsMore from Samsung in Chips & hardware
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Summaries are simplified from the filing’s own abstract and first claim. A patent filing is not a product announcement.
Patent data and drawings: U.S. Patent and Trademark Office (USPTO). Nebula is not affiliated with or endorsed by the USPTO.
