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Samsung patents memory chip design using high-k dielectric material

Patent drawing
Patent drawing from the official filing.

Samsung has been granted a patent for a semiconductor memory device that uses a specific insulating layer between the active parts of the chip and the word lines. This insulating layer is made of a high-k dielectric material and is designed to sit at the same height as the word lines to improve the structure's layout.

Why it mattersThis is a routine improvement in chip manufacturing that helps engineers build memory components with precise physical dimensions and electrical properties.

In the filing’s own words

A semiconductor memory device includes a bit line, first and second word lines spaced apart from each other on the bit line, a back gate electrode between the first and second word lines, a first active pattern between the first word line and the back gate electrode, a second active pattern between the second word line and the back gate electrode, contact patterns connected to the first and second active patterns, respectively, and a first gate insulating pattern between the first active pattern and the first word line and between the second active pattern and the second word line. A top surface of the first gate insulating pattern is located at substantially a same height as top surfaces of the first and second word lines. The first gate insulating pattern includes a high-k dielectric material.

What exactly they claim (claim 1)

1. A semiconductor memory device comprising: a bit line extending in a first direction; a first word line and a second word line which extend in a second direction intersecting the first direction on the bit line, and the first word line and the second word line are spaced apart from each other in the first direction; a back gate electrode extending in the second direction between the first word line and the second word line; a first active pattern between the first word line and the back gate electrode; a second active pattern between the second word line and the back gate electrode; contact patterns connected to the first active pattern and the second active pattern, respectively; and a first gate insulating pattern between the first active pattern and the first word line and between the second active pattern and the second word line, wherein a top surface of the first gate insulating pattern is located at substantially a same height as a top surface of the first word line and a top surface of the second word line, and wherein the first gate insulating pattern includes a high-k dielectric material.

Facts

Company
Samsung (Samsung Electronics Co., Ltd.)
Official title
Semiconductor memory device including gate insulating pattern including high-k dielectric material
Patent number
US12764931B2
Application number
18480389
Filed
Oct 3, 2023
Granted
Oct 13, 2026
Inventors
4
Claims
20

Classified under

H10B 12/315 Electricity & electronicsH10B 12/05 Electricity & electronics

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Summaries are simplified from the filing’s own abstract and first claim. A patent filing is not a product announcement.
Patent data and drawings: U.S. Patent and Trademark Office (USPTO). Nebula is not affiliated with or endorsed by the USPTO.