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Samsung patents 3D memory chip with mixed-type source layer

Patent drawing
Patent drawing from the official filing.

Samsung has been granted a patent for a semiconductor device where the memory cells are stacked vertically on top of the control circuits. The design features a shared source layer at the top of the vertical channel that contains two different types of electrical impurities to manage how current flows.

Why it mattersThis filing details a specific structural improvement to 3D NAND memory, which could help manufacturers build denser or more efficient storage chips.

In the filing’s own words

A semiconductor device includes a peripheral circuit structure and a cell structure stacked on the peripheral circuit structure. The cell structure includes a plurality of gate electrodes spaced apart from each other in a vertical direction, a channel structure passing through the plurality of gate electrodes and extending in the vertical direction, the channel structure having a first end close to the peripheral circuit structure and a second end opposite to the first end, and a common source layer covering the second end of the channel structure. The channel structure includes a channel layer extending in the vertical direction, the common source layer includes a first region and a second region that contain impurities of different conductivity types, and the first region of the common source layer is connected to at least a portion of the channel layer.

What exactly they claim (claim 1)

1. A semiconductor device comprising: a peripheral circuit structure; and a cell structure stacked on the peripheral circuit structure, the cell structure comprising a cell region, a connection region located next to the cell region in a first horizontal direction, and a peripheral circuit connection region surrounding the cell region and the connection region, wherein the cell structure comprises: a plurality of gate electrodes, each of the gate electrodes being arranged in the cell region and spaced apart from each other in a vertical direction; a channel structure passing through the gate electrodes in the cell region and extending in the vertical direction, the channel structure having a first end close to the peripheral circuit structure and a second end opposite to the first end; and a common source layer disposed above the plurality of gate electrodes and covering the second end of the channel structure, wherein the channel structure comprises a channel layer extending in the vertical direction, wherein the common source layer comprises a first region and a second region that contain impurities of different conductivity types, and wherein the first region of the common source layer is connected to at least a portion of the channel layer.

Facts

Company
Samsung (SAMSUNG ELECTRONICS CO., LTD.)
Official title
Semiconductor device
Patent number
US12757434B2
Application number
18629093
Filed
Apr 8, 2024
Granted
Oct 6, 2026
Inventors
7
Claims
20

Classified under

H10D 30/63 Electricity & electronicsH10B 80/00 Electricity & electronicsH10D 62/149 Electricity & electronicsH10D 62/292 Electricity & electronicsH10W 90/00 Electricity & electronicsH10W 90/792 Electricity & electronics

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Summaries are simplified from the filing’s own abstract and first claim. A patent filing is not a product announcement.
Patent data and drawings: U.S. Patent and Trademark Office (USPTO). Nebula is not affiliated with or endorsed by the USPTO.