Samsung patents chamber design for extreme ultraviolet light source
Samsung describes a device that uses a laser to hit a droplet of material, creating extreme ultraviolet light used in chip manufacturing. The design includes a specific chamber layout with mirrors, a droplet supply, and two separate exhaust ports to remove waste gases and debris.
In the filing’s own words
An extreme ultraviolet light source device includes a chamber having a lower surface on which a condensing mirror is arranged, an intermediate focus, and a side surface between the lower surface and an upper surface a first exhaust port and a second exhaust port on the upper surface and spaced apart from the intermediate focus; a droplet supply adjacent to the side surface of the chamber, and configured to supply a droplet to generate the extreme ultraviolet light into the chamber; a light source configured to generate the extreme ultraviolet light by oscillating a laser; a catch adjacent to the side surface of the chamber, opposite to the droplet supply, and configured to receive the droplet discharged from the droplet supply unit; a first exhaust connected to the first exhaust port; and a second exhaust adjacent to the upper surface of the chamber, and connected to the second exhaust port.
What exactly they claim (claim 1)
1. An extreme ultraviolet light source device, comprising: a chamber having a lower surface on which a condensing mirror is arranged, the chamber having an upper surface having an intermediate focus that is configured to have extreme ultraviolet light, reflected by the condensing mirror, be emitted, and the chamber having a side surface between the lower surface and the upper surface, the chamber including a first exhaust port on the side surface, and a second exhaust port on the upper surface on a level equal to or lower than a level of the intermediate focus and spaced apart from the intermediate focus; a droplet supply adjacent to the side surface of the chamber, and configured to supply a droplet to generate the extreme ultraviolet light in the chamber; a light source adjacent to the lower surface of the chamber, and configured to generate the extreme ultraviolet light from the droplet by oscillating a laser; a catch adjacent to the side surface of the chamber, opposite to the droplet supply, and configured to receive the droplet that is discharged from the droplet supply; a first exhaust adjacent to the side surface of the chamber, and connected to the first exhaust port; and a second exhaust adjacent to the upper surface of the chamber, and connected to the second exhaust port.
Facts
- Company
- Samsung (Samsung Electronics Co., Ltd.)
- Official title
- Extreme ultraviolet light source device
- Patent number
- US12757312B2
- Application number
- 18338789
- Filed
- Jun 21, 2023
- Granted
- Oct 6, 2026
- Inventors
- 4
- Claims
- 19
Classified under
H05G 2/0092 Electricity & electronicsG03F 7/70033 Physics & computingG03F 7/70916 Physics & computingH05G 2/009 Electricity & electronicsG02B 19/0019 Physics & computingG21K 1/06 Physics & computingMore from Samsung in Chips & hardware
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Summaries are simplified from the filing’s own abstract and first claim. A patent filing is not a product announcement.
Patent data and drawings: U.S. Patent and Trademark Office (USPTO). Nebula is not affiliated with or endorsed by the USPTO.