Samsung patents method to adjust electron beam exposure time for chip masks
This patent describes a method for creating the stencils used to make computer chips by measuring the electrical current of unused electron beams. If the measured current falls outside a specific range, the system automatically adjusts the exposure time to ensure the pattern is printed correctly.
In the filing’s own words
An E-beam exposure method may include receiving exposure information on a pattern subject to exposure, determining on beams and off beams of an E-beam exposure apparatus, determining an exposure time in an exposure process, performing the exposure process using the E-beam exposure apparatus, measuring a current of the off beams on an aperture plate of the E-beam exposure apparatus, and a first determination of determining whether the current is within a reference range. If the current is not within the reference range in the first determination, the determining the exposure time may be performed and the exposure time may be changed.
What exactly they claim (claim 1)
1. An E-beam exposure method comprising: receiving exposure information on a pattern subject to exposure; determining on beams and off beams of an E-beam exposure apparatus; determining an exposure time in an exposure process; performing the exposure process using the E-beam exposure apparatus; measuring a current of the off beams on an aperture plate of the E-beam exposure apparatus; and a first determination of determining whether the current is within a reference range, wherein in response to the current not being within the reference range in the first determination, the determining the exposure time is performed and the exposure time is changed.
Facts
- Company
- Samsung (Samsung Electronics Co., Ltd.)
- Official title
- E-beam exposure method and mask manufacturing method comprising the same
- Patent number
- US12755931B2
- Application number
- 18667209
- Filed
- May 17, 2024
- Granted
- Oct 6, 2026
- Inventors
- 1
- Claims
- 20
Classified under
H01J 37/3177 Electricity & electronicsH01J 37/244 Electricity & electronicsH01J 37/304 Electricity & electronicsH01J 2237/0451 Electricity & electronicsH01J 2237/24564 Electricity & electronicsMore from Samsung in Chips & hardware
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Summaries are simplified from the filing’s own abstract and first claim. A patent filing is not a product announcement.
Patent data and drawings: U.S. Patent and Trademark Office (USPTO). Nebula is not affiliated with or endorsed by the USPTO.