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Samsung patents 3D memory design with narrower channels than contacts

Samsung describes a 3D semiconductor structure where memory channels are physically narrower than the electrical contacts that connect them. The design uses stacked layers of insulating and conductive materials to create vertical memory cells. This specific arrangement aims to optimize the physical layout of the memory component.

Why it mattersThis is a technical refinement in memory chip manufacturing that could help engineers pack more data into smaller spaces.

In the filing’s own words

Disclosed are semiconductor devices, electronic systems including the same, and methods of fabricating the same. The semiconductor device comprises a first gate stack structure including a first dielectric pattern and a first conductive pattern that are alternately stacked with each other, a memory channel structure including a first memory portion that penetrates the first gate stack structure, a through contact including a first through portion at a level the same as a level of the first memory portion, and a connection contact including a first connection portion at a level the same as the level of the first memory portion and the level of the first through portion. A minimum width of the first memory portion is less than a minimum width of the first through portion and a minimum width of the first connection portion.

What exactly they claim (claim 1)

1. A semiconductor device, comprising: a first gate stack structure including a first dielectric pattern and a first conductive pattern that are alternately stacked with each other; a memory channel structure including a first memory portion that penetrates the first gate stack structure; a through contact including a first through portion at a level the same as a level of the first memory portion; and a connection contact including a first connection portion at a level the same as the level of the first memory portion and the level of the first through portion, wherein a minimum width of the first memory portion is less than a minimum width of the first through portion and a minimum width of the first connection portion.

Facts

Company
Samsung (SAMSUNG ELECTRONICS CO., LTD.)
Official title
Semiconductor device, electronic system including the same, and method of fabricating the same
Patent number
US12751010B2
Application number
18208459
Filed
Jun 12, 2023
Granted
Sep 29, 2026
Inventors
11
Claims
20

Classified under

H10B 43/27 Electricity & electronicsH10B 41/10 Electricity & electronicsH10B 41/27 Electricity & electronicsH10B 41/35 Electricity & electronicsH10B 43/10 Electricity & electronicsH10B 43/35 Electricity & electronics

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Summaries are simplified from the filing’s own abstract and first claim. A patent filing is not a product announcement.
Patent data and drawings: U.S. Patent and Trademark Office (USPTO). Nebula is not affiliated with or endorsed by the USPTO.