Samsung patents airbag to speed up vacuum cleaning in chip-making tools
Samsung describes a focused ion beam machine that uses a special airbag inside its chamber. The airbag inflates before the machine pumps out the air, which shrinks the space that needs to be cleaned.
In the filing’s own words
A focused ion beam apparatus may include an ion beam emitter for emitting an ion beam, a focused ion beam chamber into which ion gas may be introduced, a sample stage in the focused ion beam chamber to support a wafer sample, and an air bag in the focused ion beam chamber. The airbag may be positioned to not interfere with the sample stage.
What exactly they claim (claim 1)
1. A focused ion beam apparatus comprising: an ion beam emitter configured to emit an ion beam; a focused ion beam chamber for having ion gas introduced therein; a sample stage in the focused ion beam chamber, the sample stage being configured to support a wafer sample; and an airbag in the focused ion beam chamber, the airbag arranged to not interfere with the sample stage, wherein the airbag is spaced apart from an outer edge of the sample stage in an outer periphery of the sample stage, and the airbag is configured to inflate before evacuating the focused ion beam chamber to reduce an effective volume being evacuated in the focused ion beam chamber.
Facts
- Company
- Samsung (Samsung Electronics Co., Ltd.)
- Official title
- Focused ion beam apparatus and control method thereof
- Patent number
- US12749647B2
- Application number
- 18504630
- Filed
- Nov 8, 2023
- Granted
- Sep 29, 2026
- Inventors
- 2
- Claims
- 20
Classified under
H01J 37/16 Electricity & electronicsH01J 37/08 Electricity & electronicsH01J 37/18 Electricity & electronicsH01J 2237/022 Electricity & electronicsH01J 2237/1825 Electricity & electronicsMore from Samsung in Chips & hardware
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Summaries are simplified from the filing’s own abstract and first claim. A patent filing is not a product announcement.
Patent data and drawings: U.S. Patent and Trademark Office (USPTO). Nebula is not affiliated with or endorsed by the USPTO.