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Samsung patents laser tool that checks material structure and heat response

Patent drawing
Patent drawing from the official filing.

This device shines two different types of light onto a sample to analyze it. One light heats the surface slightly, while the other measures how that heat changes the light's reflection to reveal physical properties.

Why it mattersIt offers a way to inspect materials by combining structural imaging with thermal property analysis in a single setup.

In the filing’s own words

An optical measurement apparatus includes a first light emitter configured to emit a first light on a surface of a sample, a second light emitter configured to emit a second light on the surface of the sample on which the first light is focused, a physical property detector configured to obtain physical property information of the sample by detecting a change in an amount of light of the second light due to a photothermal effect of the first light on the surface of the sample, and at least one structure detector configured to obtain structural information of the sample by detecting a reflected light of at least one of the first light and the second light that is reflected from the surface of the sample.

What exactly they claim (claim 1)

1. An optical measurement apparatus, comprising: a stage configured to support a sample; a first light source configured to generate a first light having a first wavelength, the first light comprising pulsed light; a second light source configured to generate a second light having a second wavelength shorter than the first wavelength; an illumination optics comprising at least one mirror or lens and configured to emit the first light and the second light on a surface of the sample; a light receiving optics comprising at least one mirror or lens configured to receive first reflected light of the first light that is reflected from the surface of the sample and second reflected light of the second light that is reflected from the surface of the sample; a physical property detector configured to obtain physical property information of the sample by detecting a change in an amount of light of the second light due to a photothermal effect of the first light on the surface of the sample; and at least one structure detector configured to obtain structural information of the sample by detecting at least one of the first reflected light and the second reflected light received by the light receiving optics.

Facts

Company
Samsung (SAMSUNG ELECTRONICS CO., LTD.)
Official title
Optical measurement apparatus and optical measurement method
Patent number
US12748039B2
Application number
18754702
Filed
Jun 26, 2024
Granted
Sep 29, 2026
Inventors
7
Claims
16

Classified under

G01N 21/211 Physics & computingG01N 21/9501 Physics & computingG01N 21/956 Physics & computingG01N 2021/213 Physics & computing
Read the full filing (official PDF) ↗ Open in the Patent Tracker

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Summaries are simplified from the filing’s own abstract and first claim. A patent filing is not a product announcement.
Patent data and drawings: U.S. Patent and Trademark Office (USPTO). Nebula is not affiliated with or endorsed by the USPTO.