Samsung patents light filter that removes color bias from chip checks
Samsung has been granted a patent for a semiconductor measurement system that uses a laser and a specialized light filter called a monochromator. The system splits light into specific colors and adjusts the light's orientation, or polarization, to ensure accurate readings when inspecting tiny chip features.
In the filing’s own words
Provided is a semiconductor measurement system including a laser configured to output a light having multiple wavelengths, a broadband spectrometer configured to receive the light and output monochromatic light having a single wavelength, a measurement device configured to obtain physical information of a sample based on the monochromatic light, and a computing device configured to inspect or measure the sample based on the obtained physical information, wherein the broadband spectrometer is further configured to remove polarization dependence of the light based on a wavelength and a polarization separating/combining device.
What exactly they claim (claim 1)
1. A semiconductor measurement system comprising: a monochromator comprising: a first wavelength control device configured to separate a collimated beam comprising multiple wavelengths into a plurality of wavelength bands; a second wavelength control device configured to receive diffracted light beams corresponding to the plurality of the wavelength bands and output one of the diffracted light beams as a collimated beam of a single wavelength; first polarization optics configured to separate respective separated light beams corresponding to the plurality of the wavelength bands into two polarization beams orthogonal to each other and match polarization directions of separated polarization beams; second polarization optics configured to output the diffracted light beams corresponding to the plurality of the wavelength bands by separating each of the diffracted light beams having matched polarization direction into two polarization beams orthogonal to each other and combining the separated polarization beams; and a multi-grating mount comprising diffraction gratings configured to output the diffracted light beams having the matched polarization direction by diffracting each of the polarization beams having the matched polarization direction output from the first polarization optics, wherein the multi-grating mount is configured to be rotated to scan the plurality of the wavelength bands.
Facts
- Company
- Samsung (SAMSUNG ELECTRONICS CO., LTD.)
- Official title
- Semiconductor measurement system having monochromator and operating method thereof
- Patent number
- US12747941B2
- Application number
- 18894860
- Filed
- Sep 24, 2024
- Granted
- Sep 29, 2026
- Inventors
- 10
- Claims
- 17
Classified under
G01B 11/02 Physics & computingMore from Samsung in Chips & hardware
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Summaries are simplified from the filing’s own abstract and first claim. A patent filing is not a product announcement.
Patent data and drawings: U.S. Patent and Trademark Office (USPTO). Nebula is not affiliated with or endorsed by the USPTO.