Samsung patents tube design to improve chip coating uniformity
Samsung has been granted a patent for a vertical tube used in making computer chips. The tube has a varying width, being wider at the top where the chips sit, to help gas flow evenly around the wafers.
In the filing’s own words
A substrate processing apparatus may include an inner tube providing a process space extending vertically, an outer tube enclosing the inner tube, a gas supplying conduit connected to the process space, and a boat configured to be disposed in the process space. A first inner diameter of the inner tube at a first position may be different from a second inner diameter of the inner tube at a second position, and a level of the second position may be higher than a level of the first position.
What exactly they claim (claim 1)
1. A substrate processing apparatus, comprising: an inner tube providing a process space extending vertically; an outer tube enclosing the inner tube; a gas supplying conduit connected to the process space; and a boat configured to be disposed in the process space, wherein a first inner diameter of the inner tube at a first position is different from a second inner diameter of the inner tube at a second position, wherein a level of the second position is higher than a level of the first position, and wherein, in a horizontal cross-section at the second position, an inner circumference of the inner tube has a circular shape along an entire perimeter of the inner tube, and wherein the level of the second position is within a vertical extent of the boat.
Facts
- Company
- Samsung (Samsung Electronics Co., Ltd.)
- Official title
- Substrate processing tube, substrate processing apparatus including the same, and substrate processing method using the apparatus
- Patent number
- US12747497B2
- Application number
- 18125435
- Filed
- Mar 23, 2023
- Granted
- Sep 29, 2026
- Inventors
- 5
- Claims
- 20
Classified under
C23C 16/45502 Chemistry & metalsC23C 16/4583 Chemistry & metalsC23C 16/46 Chemistry & metalsH10P 72/14 Electricity & electronicsMore from Samsung in Chips & hardware
- Samsung patents chip that combines camera and screen Oct 13, 2026
- Samsung patents faster chip testing using machine learning Sep 1, 2026
- Samsung patents radar method to pinpoint target direction more accurately Sep 1, 2026
- Samsung patents memory chip that searches data by content, not address Sep 1, 2026
- Samsung patents chip design that skips empty data to speed up AI Sep 1, 2026
Summaries are simplified from the filing’s own abstract and first claim. A patent filing is not a product announcement.
Patent data and drawings: U.S. Patent and Trademark Office (USPTO). Nebula is not affiliated with or endorsed by the USPTO.