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Samsung patents memory chip design with uneven support layers

Samsung describes a semiconductor memory device built with multiple layers of stacked gate electrodes and supporting structures. The design uses cut patterns in the support layers to create different ratios of solid material to gaps at various heights. This variation in structure helps manage the physical layout of the memory cells.

Why it mattersThis is a specific engineering approach to stacking memory components, which may help manufacturers optimize the density or reliability of future chips.

In the filing’s own words

A semiconductor memory device includes a first stacked structure, a first supporter layer, a second stacked structure, a block cut structure, and a second supporter layer on the second stacked structure and separated by a second cut pattern. The first stacked structure includes a first and second stack, the second stacked structure includes a third stack separated by the block cut structure and a fourth stack, the first supporter layer is on the first stack and the second stack, the second supporter layer is on the third stack and the fourth stack, the first cut pattern includes a first connection on the block cut structure and connecting the first supporter layer and the second stack, and the second cut pattern of the second supporter layer includes a second connection on the block cut structure and connecting the second supporter layer placed on the third stack and the fourth stack.

What exactly they claim (claim 1)

1. A semiconductor memory device comprising: a first stacked structure including first gate electrodes sequentially stacked on a substrate; a first supporter layer disposed on the first stacked structure and divided by first cut patterns extending in a first direction, wherein each of the first cut patterns comprises first sub-cut patterns spaced apart from each other in a second direction intersecting the first direction; a second stacked structure including second gate electrodes sequentially stacked on the first supporter layer; a second supporter layer disposed on the second stacked structure and divided by second cut patterns extending in the first direction, wherein each of the second cut patterns comprises second sub-cut patterns spaced apart from each other in the second direction; a third stacked structure including third gate electrodes sequentially stacked on the second supporter layer; a third supporter layer disposed on the third stacked structure and divided by third cut patterns extending in the first direction, wherein each of the third cut patterns comprises third sub-cut patterns spaced apart from each other in the second direction; and a channel structure penetrating the first stacked structure, the first supporter layer, the second stacked structure, the second supporter layer and the third stacked structure, wherein the first supporter layer includes a first ratio of an area of the first cut patterns to an area of the first supporter layer, the second supporter layer includes a second ratio of an area of the second cut patterns to an area of the second supporter layer, the third supporter layer includes a third ratio of an area of the third cut patterns to an area of the third supporter layer, and at least one of the first ratio, the second ratio, or the third ratio is different from an other ratio of the first ratio, the second ratio, or the third ratio.

Facts

Company
Samsung (Samsung Electronics Co., Ltd.)
Official title
Semiconductor memory device
Patent number
US12740063B2
Application number
18595737
Filed
Mar 5, 2024
Granted
Sep 15, 2026
Inventors
5
Claims
20

Classified under

H10B 43/27 Electricity & electronicsH10B 41/10 Electricity & electronicsH10B 41/27 Electricity & electronicsH10B 43/10 Electricity & electronics

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Summaries are simplified from the filing’s own abstract and first claim. A patent filing is not a product announcement.
Patent data and drawings: U.S. Patent and Trademark Office (USPTO). Nebula is not affiliated with or endorsed by the USPTO.