Samsung patents memory chip design with buried gate structure
Samsung has been granted a patent for a semiconductor memory device that uses a gate structure extending into the active area of the chip. The design places a metal-containing layer on top of the gate, separated by a thin barrier layer made of nitride to protect the underlying components.
In the filing’s own words
A semiconductor device includes a substrate having an active region and a gate structure crossing the active region. The gate structure may include a gate pattern penetrating an upper portion of the active region in a first direction perpendicular to a bottom surface of the substrate, a metal-containing pattern on the gate pattern, and a barrier pattern interposed between the gate pattern and the metal-containing pattern and extended to face opposite side surfaces of the metal-containing pattern.
What exactly they claim (claim 1)
1. A semiconductor device, comprising: a substrate including an active region; a gate structure crossing the active region, the gate structure including: a gate pattern penetrating an upper portion of the active region in a first direction perpendicular to a bottom surface of the substrate, a metal-containing pattern on the gate pattern disposed at a first height above the bottom surface of the substrate and disposed so that in the first direction, the gate pattern is between the active region of the substrate and the metal-containing pattern, the metal-containing pattern including a bottom surface facing the gate pattern and opposite side surfaces extending from the bottom surface away from the gate pattern, a barrier pattern between the gate pattern and the metal-containing pattern, the barrier pattern formed of a nitride and extending along the opposite side surfaces of the metal-containing pattern, wherein the gate pattern is disposed both above and below a topmost surface of the active region, and a gate insulating pattern between a bottom surface of the gate pattern and the substrate, the gate insulating pattern additionally extending along opposite side surfaces of the gate pattern, and formed of a continuous material extending continuously from the bottom surface of the gate pattern to the first height to overlap the metal-containing pattern in a second direction parallel to the bottom surface of the substrate; and a pair of impurity regions disposed adjacent to opposite side surfaces of the gate structure such that the gate structure is at a height above a topmost portion of each impurity region and is at a height below a bottommost portion of each impurity region.
Facts
- Company
- Samsung (SAMSUNG ELECTRONICS CO., LTD.)
- Official title
- Semiconductor memory device including buried gate pattern
- Patent number
- US12740048B2
- Application number
- 17957242
- Filed
- Sep 30, 2022
- Granted
- Sep 15, 2026
- Inventors
- 2
- Claims
- 20
Classified under
H10B 12/34 Electricity & electronicsH10B 12/053 Electricity & electronicsH10B 12/09 Electricity & electronicsH10B 12/50 Electricity & electronicsH10D 64/513 Electricity & electronicsH10D 64/514 Electricity & electronicsMore from Samsung in Chips & hardware
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Summaries are simplified from the filing’s own abstract and first claim. A patent filing is not a product announcement.
Patent data and drawings: U.S. Patent and Trademark Office (USPTO). Nebula is not affiliated with or endorsed by the USPTO.