Samsung patents chip-making tool that tunes plasma power in real time
Samsung has been granted a patent for a machine used to process thin sheets of material, such as silicon wafers, using plasma. The device includes a filter that automatically adjusts its electrical resistance to match changes in the power supply, ensuring the plasma stays stable during the manufacturing process.
In the filing’s own words
Various example embodiments of the present disclosure provide a substrate processing apparatus including a chamber, an excitation power supply configured to generate a supply power for plasma excitation, a support inside the chamber configured to support a substrate, and a filter connected to the support. The filter is configured to change frequency characteristics of the supply power by changing an impedance of the filter based on a change in an output level of the excitation power supply.
What exactly they claim (claim 1)
1. A substrate processing apparatus comprising: a chamber; an excitation power supply configured to generate a supply power for plasma excitation; a support inside the chamber configured to support a substrate; a filter connected to the support; and a controller, wherein the controller is configured to change frequency characteristics of the supply power by changing an impedance of the filter with a timing that is based on a timing of a change in an output level of the excitation power supply.
Facts
- Company
- Samsung (Samsung Electronics Co., Ltd.)
- Official title
- Substrate processing apparatus
- Patent number
- US12738454B2
- Application number
- 18769769
- Filed
- Jul 11, 2024
- Granted
- Sep 15, 2026
- Inventors
- 8
- Claims
- 20
Classified under
H01J 37/32174 Electricity & electronicsH01J 37/32091 Electricity & electronicsH01J 37/32724 Electricity & electronicsMore from Samsung in Chips & hardware
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Summaries are simplified from the filing’s own abstract and first claim. A patent filing is not a product announcement.
Patent data and drawings: U.S. Patent and Trademark Office (USPTO). Nebula is not affiliated with or endorsed by the USPTO.