Samsung patents wafer scanner that self-calibrates using material differences
Samsung has been granted a patent for a machine that inspects computer chips by shooting them with electrons. The device creates an image of the wafer and automatically adjusts its sensitivity by comparing how different materials react to the electron beam.
In the filing’s own words
A wafer measurement apparatus includes an electronic-optical system configured to irradiate a wafer with an electron beam and acquire a raw signal by detecting electrons emitted by the wafer, and an image processing device configured to convert the raw signal acquired by the electronic-optical system into image data. The electronic-optical system includes a detector configured to acquire the raw signal. The detector calibrates a gain offset using a difference in electron emission yields of different materials.
What exactly they claim (claim 1)
1. A wafer measurement apparatus, comprising: an electronic-optical system configured to irradiate a wafer with an electron beam and acquire a raw signal by detecting electrons emitted by the wafer; and an image processing device configured to convert the raw signal acquired by the electronic-optical system into image data, wherein the electronic-optical system comprises a detector configured to acquire the raw signal, and the detector calibrates a gain offset using a difference in electron emission yields of different materials.
Facts
- Company
- Samsung (SAMSUNG ELECTRONICS CO., LTD.)
- Official title
- Wafer measurement apparatus and operating method thereof
- Patent number
- US12736488B2
- Application number
- 18458565
- Filed
- Aug 30, 2023
- Granted
- Sep 15, 2026
- Inventors
- 5
- Claims
- 20
Classified under
G01N 23/2251 Physics & computingG06T 7/0004 Physics & computingG06T 7/80 Physics & computingG01N 2223/303 Physics & computingG01N 2223/401 Physics & computingG01N 2223/6116 Physics & computingMore from Samsung in Chips & hardware
- Samsung patents chip that combines camera and screen Oct 13, 2026
- Samsung patents faster chip testing using machine learning Sep 1, 2026
- Samsung patents radar method to pinpoint target direction more accurately Sep 1, 2026
- Samsung patents memory chip that searches data by content, not address Sep 1, 2026
- Samsung patents chip design that skips empty data to speed up AI Sep 1, 2026
Summaries are simplified from the filing’s own abstract and first claim. A patent filing is not a product announcement.
Patent data and drawings: U.S. Patent and Trademark Office (USPTO). Nebula is not affiliated with or endorsed by the USPTO.