Samsung patents memory chip design using two types of oxide materials
Samsung has been granted a patent for a specific structure used in semiconductor memory devices. The design uses a channel made of an amorphous oxide material, which is mixed with a crystalline oxide layer to form the active part of the transistor.
In the filing’s own words
A semiconductor device includes a bit line on a substrate, a gate electrode on the bit line, a gate insulation pattern on a sidewall of the gate electrode, a channel that contacts an upper surface of the bit line and a sidewall of the gate insulation pattern, an oxide semiconductor pattern that contacts an upper sidewall of the channel, and a contact plug that contacts an upper surface of the channel and an upper surface of the oxide semiconductor pattern. The channel includes an amorphous oxide semiconductor material. The oxide semiconductor pattern includes a crystalline oxide semiconductor material.
What exactly they claim (claim 1)
1. A semiconductor device comprising: a bit line on a substrate; a gate electrode on the bit line; a gate insulation pattern on a sidewall of the gate electrode; a channel that contacts an upper surface of the bit line and a sidewall of the gate insulation pattern, the channel including an amorphous oxide semiconductor material; an oxide semiconductor pattern that contacts an upper sidewall of the channel, the oxide semiconductor pattern including a crystalline oxide semiconductor material; and a contact plug that contacts a top surface of the channel and an upper surface of the oxide semiconductor pattern.
Facts
- Company
- Samsung (Samsung Electronics Co., Ltd.)
- Official title
- Semiconductor devices
- Patent number
- US12733207B2
- Application number
- 18347770
- Filed
- Jul 6, 2023
- Granted
- Sep 8, 2026
- Inventors
- 1
- Claims
- 20
Classified under
H10D 30/6728 Electricity & electronicsH10B 12/315 Electricity & electronicsH10B 12/482 Electricity & electronicsH10D 30/673 Electricity & electronicsH10D 30/6756 Electricity & electronicsH10W 20/435 Electricity & electronicsMore from Samsung in Chips & hardware
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Summaries are simplified from the filing’s own abstract and first claim. A patent filing is not a product announcement.
Patent data and drawings: U.S. Patent and Trademark Office (USPTO). Nebula is not affiliated with or endorsed by the USPTO.