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SamsungGranted patentChips & hardwareInterest 2/10

Samsung patents gear-driven stopper for semiconductor processing containers

This filing describes a mechanical stopper used in systems that process semiconductor wafers. It uses a pair of gears to rotate a tube coupler, which allows an insertion tube to be positioned accurately within a container.

Why it mattersIt is a specific mechanical component for the internal machinery of chip manufacturing, improving the precision of how tools interact with wafer containers.

In the filing’s own words

A container stopper may include a first gear having a first axis extended in a first direction, a second gear spaced apart from the first axis in a horizontal direction crossing the first direction, a tube coupler coupled to the first gear, and an insertion tube extended from the tube coupler in a downward direction. The tube coupler may include a coupler body coupled to the first gear to be rotatable to the first gear and a first tube fastener, which is placed on and coupled to the coupler body and is connected to the insertion tube. The first gear may have a female thread structure formed on an inner side surface of the first gear, and the second gear may have a rotary coupling structure formed on a top or bottom surface of the second gear.

What exactly they claim (claim 1)

1. A substrate processing system comprising a container stopper, wherein the container stopper comprises: a first gear having a first axis extended in a first direction; a second gear spaced apart from the first axis in a horizontal direction crossing the first direction; a tube coupler coupled to the first gear; and an insertion tube extended from the tube coupler in a downward direction, wherein the tube coupler comprises: a coupler body coupled to the first gear to be rotatable in relation to the first gear; and a first tube fastener, which is placed on and coupled to the coupler body and is connected to the insertion tube, wherein the first gear has a female thread structure formed on an inner side surface of the first gear, and wherein the second gear has a rotary coupling structure formed on a top or bottom surface of the second gear.

Facts

Company
Samsung (Samsung Electronics Co., Ltd.)
Official title
Container stopper, substrate processing system including the same, and substrate processing method using the same
Patent number
US12730379B2
Application number
18390194
Filed
Dec 20, 2023
Granted
Sep 8, 2026
Inventors
5
Claims
20

Classified under

G03F 7/16 Physics & computingB65D 41/0492 Operations & transportB65D 47/06 Operations & transport
Read the full filing (official PDF) ↗ Open in the Patent Tracker

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Summaries are simplified from the filing’s own abstract and first claim. A patent filing is not a product announcement.
Patent data and drawings: U.S. Patent and Trademark Office (USPTO). Nebula is not affiliated with or endorsed by the USPTO.