Sony patents gas sensor that cleans itself to identify specific gases
Sony describes a device that uses a metal oxide sensor to detect gases by measuring its electrical resistance at different temperatures. The system automatically cleans the sensor with hot air before taking low-temperature readings to ensure accurate identification of specific gas types.
In the filing’s own words
[Object] To provide a measurement apparatus and a measurement method that are capable of easily identifying a specific gas species. [Solving Means] A measurement apparatus according to an embodiment of the present technology includes: a measurement unit; a measurement unit; a gas supply unit; and a control unit. The measurement unit includes a metal oxide semiconductor sensor and a heating unit that heats the semiconductor sensor to a first temperature, a second temperature, or a third temperature, the second temperature and the third temperature being higher than the first temperature. The control unit controls the measurement unit and the gas supply unit. The control unit is capable of executing refresh treatment for heating the semiconductor sensor in a first gas atmosphere that does not contain a reducing gas to the third temperature to clean the semiconductor sensor, low-temperature measurement treatment for heating the semiconductor sensor to the first temperature in a second gas atmosphere that contains the reducing gas to measure a resistance value of the semiconductor sensor, and high-temperature measurement treatment for heating the semiconductor sensor to the second temperature in the second gas atmosphere to measure the resistance value of the semiconductor sensor, and the control unit executes the low-temperature measurement treatment as a process following the refresh treatment.
What exactly they claim (claim 1)
1. A measurement apparatus, comprising: a measurement unit that includes one or more semiconductor sensors each including an adsorption layer formed of metal oxide, a measurement chamber that houses the semiconductor sensor, and a heating unit that heats the semiconductor sensor to a first temperature, a second temperature, or a third temperature, the second temperature and the third temperature being higher than the first temperature; a gas supply unit that includes a first gas supply line and a second gas supply line, the first gas supply line supplying a first gas that does not contain a reducing gas to be detected to the measurement chamber, the second gas supply line supplying a second gas that contains the reducing gas to the measurement chamber; and a control unit that controls the measurement unit and the gas supply unit, the control unit being capable of executing refresh treatment for cleaning the adsorption layer while heating the semiconductor sensor to the third temperature in an atmosphere of the first gas, low-temperature measurement treatment for measuring a resistance value of the semiconductor sensor while heating the semiconductor sensor to the first temperature in an atmosphere of the second gas, and high-temperature measurement treatment for measuring the resistance value of the semiconductor sensor while heating the semiconductor sensor to the second temperature in the atmosphere of the second gas, the control unit executing the low-temperature measurement treatment as a process following the refresh treatment.
Facts
- Company
- Sony (SONY GROUP CORPORATION)
- Official title
- MEASUREMENT APPARATUS AND MEASUREMENT METHOD
- Publication number
- US20260259163A1
- Application number
- 18858409
- Filed
- Mar 9, 2023
- Published
- Sep 3, 2026
- Inventors
- 6
- Claims
- 13
Classified under
G01N 27/124 Physics & computingG01N 27/14 Physics & computingG01N 33/0029 Physics & computingG01N 33/0047 Physics & computingMore from Sony in Chips & hardware
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Summaries are simplified from the filing’s own abstract and first claim. A patent filing is not a product announcement.
Patent data and drawings: U.S. Patent and Trademark Office (USPTO). Nebula is not affiliated with or endorsed by the USPTO.