Samsung patents robot that swaps gas cylinders in chip factories
Samsung describes a robotic system designed to automatically replace gas cylinders used in semiconductor manufacturing. The robot uses a camera to locate the cylinder, then swaps specialized tools to open valves and detach gas pipes.
In the filing’s own words
A gas cylinder replacement system includes a gas cabinet storing a gas pipe and a gas cylinder; a gas cylinder replacement apparatus; and a controller to control the gas cylinder replacement apparatus. The gas cylinder replacement apparatus includes a body including a first surface and a second surface; a locomotion unit on the second surface; a manipulator on the first surface and including a tool changer; a vision unit at a distal end of the manipulator; a valve manipulation unit attachable to or detachable from the first surface. The valve manipulation unit includes a first fastener; and a first gripper connected to the first fastener; and a pipe handling unit attachable to or detachable from the first surface. The pipe handling unit includes a second fastener; a second gripper connected to the second fastener; and a gear to rotate the second gripper.
What exactly they claim (claim 1)
1. A gas cylinder replacement system comprising: a gas cabinet configured to store therein a gas pipe and a gas cylinder removed from the gas pipe; a gas cylinder replacement apparatus; and a controller configured to control the gas cylinder replacement apparatus, wherein the gas cylinder replacement apparatus includes: a body including a first surface and a second surface different from each other; a locomotion unit installed on the second surface and configured to travel in a semiconductor process line; a manipulator installed on the first surface and including a tool changer; a vision unit installed at a distal end of the manipulator and configured to determine a location of the gas cylinder; a valve manipulation unit configured to be attached to or detached from the first surface, wherein the valve manipulation unit includes: a first fastener configured to connect to the tool changer; and a first gripper connected to the first fastener and configured to grip and rotate a valve locking device of the gas cylinder; and a pipe handling unit configured to be attached to or detached from the first surface, wherein the pipe handling unit includes: a second fastener configured to connect to the tool changer; a second gripper connected to the second fastener and configured to grip a connector of the gas pipe; and a gear configured to rotate the second gripper, and wherein the manipulator is configured to couple the tool changer with, or remove the tool changer from, the valve manipulation unit or the pipe handling unit.
Facts
- Company
- Samsung (Samsung Electronics Co., Ltd.)
- Official title
- GAS CYLINDER REPLACEMENT SYSTEM
- Publication number
- US20260318488A1
- Application number
- 19720368
- Filed
- Jun 25, 2026
- Published
- Oct 15, 2026
- Inventors
- 3
- Claims
- 20
Classified under
F17C 13/084 Mechanical engineeringF17C 2201/0104 Mechanical engineeringF17C 2205/0111 Mechanical engineeringF17C 2205/0323 Mechanical engineeringF17C 2270/0518 Mechanical engineeringMore from Samsung in Robots & automation
- Samsung patents robot that turns toward people based on who is speaking Oct 1, 2026
- Samsung patents robot vacuum that adjusts suction based on floor type Sep 8, 2026
- Samsung patents robot that adjusts hearing based on nearby objects Sep 8, 2026
- Samsung patents vacuum that senses floor type via pressure and motor load Sep 15, 2026
- Samsung patents robot that learns from user feedback on camera views Sep 15, 2026
Summaries are simplified from the filing’s own abstract and first claim. A patent filing is not a product announcement.
Patent data and drawings: U.S. Patent and Trademark Office (USPTO). Nebula is not affiliated with or endorsed by the USPTO.