Apple patents sensor fix that corrects for temperature and humidity drift
Apple has patented a method for improving the accuracy of tiny mechanical sensors, known as MEMS, which measure things like motion or pressure. The system uses extra wires to detect how environmental factors like humidity change the electrical properties of the sensor's packaging. It then uses this data to automatically adjust the sensor's readings to keep them accurate.
In the filing’s own words
Disclosed herein are electronic sensor systems and methods of their operation. The electronic sensor systems contain a micro-electromechanical system (MEMS) for measuring a physical parameter such as rotation, pressure, acceleration, or another physical parameter. The electronic sensor systems also contain an integrated circuit linked with the MEMS. The integrated circuit contains a MEMS sensing circuit that receives outputs from the MEMS through conductors, such as wire bonds or ball joints, at least partially encapsulated in a dielectric. The dielectric may experience environmentally-induced changes to its dielectric constant that may affect a capacitance between a pair of the conductors, which can affect a measurement provided by the MEMS. The integrated circuit contains a compensation circuit that measures a capacitance between a pair of the conductors and provides an adjustment to a measurement provided by the MEMS.
What exactly they claim (claim 1)
1. An electronic sensor system, comprising: a micro-electromechanical system (MEMS) die; an integrated circuit die containing a MEMS sensing circuit and an environmental factor compensation circuit; a first set of conductors configured to carry signals from the MEMS die to the MEMS sensing circuit; a second set of conductors configured as dummy conductors and having a same construction as the first set of conductors and coupled to the environmental factor compensation circuit; and a dielectric at least partially encapsulating the first set of conductors and the second set of conductors; wherein: the environmental factor compensation circuit is configured to measure a capacitance between conductors of the second set of conductors and provide a measurement compensation value to the MEMS sensing circuit.
Facts
- Company
- Apple (Apple Inc.)
- Official title
- In-situ capacitance detection for integrated circuits and MEMS sensors
- Patent number
- US12754043B2
- Application number
- 18670088
- Filed
- May 21, 2024
- Granted
- Oct 6, 2026
- Inventors
- 3
- Claims
- 19
Classified under
G01D 5/24 Physics & computingG01P 15/125 Physics & computingMore from Apple in Chips & hardware
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Summaries are simplified from the filing’s own abstract and first claim. A patent filing is not a product announcement.
Patent data and drawings: U.S. Patent and Trademark Office (USPTO). Nebula is not affiliated with or endorsed by the USPTO.